A Compact Reconfigurable Resonator-Based Direct Current Sensing System

A compact and reconfigurable current readout system is presented that based on microelectromechanical (MEMS) resonators. The proposed generates analog digital outputs by electrothermally tuning the microbeam resonant frequency according to variations in input signal. single resonator utilized generate output, while a array operating at different frequencies one-hot output. Experiments showed shift linearly proportional square of current. has detection limit $1.16 ~\mu \text{A}$ , offers good static linearity with maximum differential/integral non-linearity 0.55/0.23 least significant bits. suitable for applications requiring high-resolution measurements. sensing small footprint, compatible large-scale integration, provides considerable flexibility reconfiguration.